Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (Q6492879)
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scientific article; zbMATH DE number 7838592
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| English | Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock |
scientific article; zbMATH DE number 7838592 |
Statements
Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (English)
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26 April 2024
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mechanical shock
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microaccelerometers
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modified couple stress theory
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finite element method
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0.8407005667686462
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0.809445858001709
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0.8068809509277344
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0.8020298480987549
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0.7966833710670471
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