Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (Q6492879)

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scientific article; zbMATH DE number 7838592
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Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock
scientific article; zbMATH DE number 7838592

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    Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (English)
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    26 April 2024
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    mechanical shock
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    microaccelerometers
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    modified couple stress theory
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    finite element method
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