Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation (Q709538)
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scientific article; zbMATH DE number 5801372
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| English | Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation |
scientific article; zbMATH DE number 5801372 |
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Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation (English)
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18 October 2010
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0.690486490726471
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0.6881192922592163
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0.6618808507919312
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0.649688184261322
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0.6492738127708435
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