Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements (Q734241)
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scientific article; zbMATH DE number 5618614
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| English | Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements |
scientific article; zbMATH DE number 5618614 |
Statements
Investigation of static and dynamic characteristics of a piezomotor for nano-and micrometric movements (English)
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20 October 2009
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static and dynamic characteristics of a piezomotor
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nano- and micrometric movements
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nanotechnology and microelectronics equipment
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0.8233684301376343
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0.8035932779312134
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0.7862060070037842
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0.7596852779388428
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