Local nonlinear dynamics of MEMS arches actuated by fringing-field electrostatic actuation (Q783370)
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scientific article; zbMATH DE number 7227423
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| English | Local nonlinear dynamics of MEMS arches actuated by fringing-field electrostatic actuation |
scientific article; zbMATH DE number 7227423 |
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Local nonlinear dynamics of MEMS arches actuated by fringing-field electrostatic actuation (English)
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4 August 2020
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MEMS
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fringing field
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nonlinear dynamics
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perturbation
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method of multiple scales
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resonance frequency
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hardening
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softening
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0.7749485969543457
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0.7725300192832947
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