Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method (Q821831)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method |
scientific article |
Statements
Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method (English)
0 references
21 September 2021
0 references
frequency equation
0 references
shear mode
0 references
frequency shift
0 references
electrode effect
0 references
\(c\)-axis tilted multi-layered FBAR
0 references
viscous media
0 references
