An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography (Q856629)
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scientific article; zbMATH DE number 5078725
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| English | An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography |
scientific article; zbMATH DE number 5078725 |
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An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography (English)
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7 December 2006
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microlithography
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silicon wafer
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post-exposure bake
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inverse heat transfer
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temperature uniformity
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scale analysis
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