Device scaling effect on the spectral-directional absorptance of Wafer's front side (Q955795)
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scientific article; zbMATH DE number 5369935
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| English | Device scaling effect on the spectral-directional absorptance of Wafer's front side |
scientific article; zbMATH DE number 5369935 |
Statements
Device scaling effect on the spectral-directional absorptance of Wafer's front side (English)
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20 November 2008
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rapid thermal processing
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finite-difference time-domain
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rigorous coupled-wave analysis
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periodic nano-structures
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0.85872555
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0.7892663
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0.78735137
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0.7775423
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