Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface (Q981291)

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Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface
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    Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface (English)
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    30 June 2010
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    thermophoresis
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    axisymmetric flow
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    wavy surface
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    cubic spline
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