Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface (Q981291)
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scientific article; zbMATH DE number 5729312
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| English | Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface |
scientific article; zbMATH DE number 5729312 |
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Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface (English)
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30 June 2010
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thermophoresis
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axisymmetric flow
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wavy surface
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cubic spline
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0.8517343997955322
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0.824843168258667
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0.7725531458854675
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0.7669855952262878
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