Kriging prediction from a circular grid: application to wafer diffusion

DOI10.1002/ASMB.1991MaRDI QIDQ6570837zbMATH OpenFDO

Authors Giovanni Pistone, Grazia Vicario

Publication date 10 July 2024

Published in Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/ASMB.1991

zbMATH Keywords

algebraic statisticsanisotropic covariancecircular gridkriging modelwafer diffusion

Mathematics Subject Classification ID

Statistics (62-XX)

Cites work

• Beugungstheorie des schneidenver-fahrens und seiner verbesserten form, der phasenkontrastmethode
• Design and analysis of computer experiments. With comments and a rejoinder by the authors
• scientific article; zbMATH DE number 4004880 (Why is no real title available?)
• scientific article; zbMATH DE number 1560708 (Why is no real title available?)
• Kriging-based sequential inspection plans for coordinate measuring machine
• Optimal reduction of a spatial monitoring grid: proposals and applications in process control
• Spatial prediction and ordinary kriging
• The design and analysis of computer experiments.

Cited in

(1)

• Inference on errors in industrial parts: kriging and variogram versus geometrical product specifications standard

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