Measurement of Biaxial Stress States in Silicon Using Micro-Raman Spectroscopy

DOI10.1115/1.2187527MaRDI QIDQ3444375zbMATH OpenOpenAlexFDO

Authors Peter A. Gustafson, Stephen Harris, Ann E. O'Neill, Anthony M. Waas

Publication date 1 June 2007

Published in Journal of Applied Mechanics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1115/1.2187527

Mathematics Subject Classification ID

Mechanics of deformable solids (74-XX)

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