Mechanical response of a capacitive microsensor under thermal load

DOI10.1016/J.CNSNS.2005.06.006MaRDI QIDQ868078zbMATH OpenOpenAlexFDO

Authors Waleed Faris, A. H. Nayfeh

Publication date 19 February 2007

Published in Communications in Nonlinear Science and Numerical Simulation (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cnsns.2005.06.006

zbMATH Keywords

Galerkin methodinstabilityMEMSnonlinear mechanics

Mathematics Subject Classification ID

PDEs in connection with mechanics of deformable solids (35Q74) PDEs in connection with classical thermodynamics and heat transfer (35Q79) Thermal effects in solid mechanics (74F05) Plates (74K20) Finite element methods applied to problems in solid mechanics (74S05)

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• Dynamic behavior and thermoelastic damping of circular single-layered black phosphorus-based mass sensor
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