On the diffraction theory of optical images

DOI10.1098/RSPA.1953.0071MaRDI QIDQ5821803zbMATH OpenOpenAlexFDO

Authors H. H. Hopkins

Publication date 1953

Published in Proceedings of the Royal Society of London. Series A: Mathematical and Physical Sciences (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1098/rspa.1953.0071

zbMATH Keywords

optics, electromagnetic theory

Cited in

(5)

• Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography
• Theory of Electron Interference Experiments
• Using the phase-space imager to analyze partially coherent imaging systems: bright-field, phase contrast, differential interference contrast, differential phase contrast, and spiral phase contrast
• Numerical quadrature on the intersection of planar disks
• Projection lithography by means of parametric photon pairs

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