Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography

MaRDI QIDQ7197657arXivFDO

Authors Ze Tao, Fu Jun Liu, Yuxi Jin, Ke Xu, Minghui Sun, Xiangsheng Hu, Qi Cao, Hanxuan Wang

Publication date 2025

Published in arXiv

arXiv classification

math-ph

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