Optimum Scan-Width Selection Under Containment Constraints

DOI10.1002/J.1538-7305.1984.TB00118.XMaRDI QIDQ3703813zbMATH OpenOpenAlexFDO

Authors M. R. Garey, Ron Y. Pinter

Publication date 1984

Published in AT&T Bell Laboratories Technical Journal (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/j.1538-7305.1984.tb00118.x

zbMATH Keywords

beam widthscircuit layoutcost functiondata structuresdynamic programmingefficient algorithmselectron exposure of integrated circuit wafersoptimal solution

Mathematics Subject Classification ID

Circuits, networks (94C99)

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