T. M. Makhviladze

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Person:1290768

Available identifiers

zbMath Open makhviladze.t-mMaRDI QIDQ1290768

List of research outcomes





PublicationDate of PublicationType
Modelling and optimization of the optical schemes of photolithography systems2001-12-11Paper
Modelling of the surface mass ejection for irradiated polymeric resistors2001-09-26Paper
Numerical modelling of etching of polymers in an oxygen-containing atmosphere2001-09-12Paper
Several aspects of the return flows formation in horizontal CVD reactors1999-08-24Paper

Research outcomes over time

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