O. I. Velichko

Available identifiers

zbMath Open velichko.o-iMaRDI QIDQ1601552

List of research outcomes

Publication	Date of Publication	Type
Simulation of boron diffusion during low-temperature annealing of implanted silicon	2012-07-15	Paper
Interstitial diffusion of ion-implanted boron in crystalline silicon	2012-07-03	Paper
Modeling of the transient interstitial diffusion of implanted atoms during low-temperature annealing of silicon substrates	2011-08-20	Paper
Simulation of coupled diffusion of impurity atoms and point defects under nonequilibrium conditions in local domain	2002-06-26	Paper
Simulation of impurity diffusion during thermal annealing in the polysilicon-silicon system	2002-03-25	Paper

Research outcomes over time

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