Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad
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Publication:1000849
DOI10.1007/s10665-008-9240-4zbMath1176.74066MaRDI QIDQ1000849
Publication date: 11 February 2009
Published in: Journal of Engineering Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10665-008-9240-4
Contact mechanics; Chemical-mechanical planarization; Grooved pads; Lubrication theory; Material removal rate; Slurry impurity