Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue

DOI10.1016/J.MECHMACHTHEORY.2008.12.006MaRDI QIDQ1016932zbMATH OpenOpenAlexFDO

Authors Binzhen Zhang, Dongming Fang

Publication date 14 May 2009

Published in Mechanism and Machine Theory (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.mechmachtheory.2008.12.006

zbMATH Keywords

pull-in voltagedeflectionelectrostatic force

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electromagnetic effects in solid mechanics (74F15)

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Cites work

• Dynamics and global stability of beam-based electrostatic microactuators

Cited in

(1)

• Design and synthesis of wide tuning range variable comb drive MEMS capacitors

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