Solid damping in micro electro mechanical systems

DOI10.1007/s11012-007-9105-3zbMath1163.74494MaRDI QIDQ1026529

Raffaele Ardito, Claudia Comi, Alberto Corigliano, Attilio Frangi

Publication date: 25 June 2009

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11012-007-9105-3

zbMATH Keywords

damping; thermoelasticity; mechanical dissipation; microelectromechanical systems; nonlocal model

Mathematics Subject Classification ID

74M25: Micromechanics of solids

74F05: Thermal effects in solid mechanics

74F15: Electromagnetic effects in solid mechanics

Related Items

Acoustic vibration problem for dissipative fluids, Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators, Decoupled three-dimensional finite element computation of thermoelastic damping using Zener's approximation, Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method, Investigation on a nanomechanical transistor, Uniqueness theorem and Hamilton's principle in linear micropolar thermopiezoelectric/piezomagnetic continuum with two relaxation times, Sensitivity, probabilistic and stochastic analysis of the thermo-piezoelectric phenomena in solids by the stochastic perturbation technique

Uses Software

• ARPACK

Cites Work

• Kronecker's canonical form and the QZ algorithm
• Linear theory of nonlocal elasticity and dispersion of plane waves
• On nonlocal elasticity
• The Quadratic Eigenvalue Problem
• ARPACK Users' Guide
• On the evaluation of damping in MEMS in the slip-flow regime
• Nonlocal elasticity and related variational principles