Thermal and residual stresses of Czochralski-grown semiconducting material
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Publication:1067813
DOI10.1016/0020-7683(86)90094-6zbMath0581.73008MaRDI QIDQ1067813
Nobuyuki Kobayashi, Toshihiro Iwaki
Publication date: 1986
Published in: International Journal of Solids and Structures (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/0020-7683(86)90094-6
quasi-stationary; finite crystal; Czochralski-grown semiconducting crystal; isotropic thermoelastic model; residual stresses after pulling; semi-infinite crystal; stresses strongly affected by Biot number; thermal stresses during pulling
74A15: Thermodynamics in solid mechanics
74M25: Micromechanics of solids
74F05: Thermal effects in solid mechanics
82D25: Statistical mechanics of crystals
74A60: Micromechanical theories