Numerical solution of an etching problem

DOI10.1016/0021-9991(85)90145-7zbMath0586.65085OpenAlexW1964729777MaRDI QIDQ1071484

C. Cuvelier, Kees Vuik

Publication date: 1985

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/0021-9991(85)90145-7

zbMATH Keywords

variational inequalitymoving grid methodwet chemical etching

Mathematics Subject Classification ID

Numerical optimization and variational techniques (65K10) Variational inequalities (49J40) Heat equation (35K05) Applications to the sciences (65Z05) Chemical kinetics in thermodynamics and heat transfer (80A30) Numerical solution of discretized equations for boundary value problems involving PDEs (65N22)

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Cites Work

• A direct method for solving two-dimensional one-phase Stefan problems
• Numerical computation of the free boundary for the two-dimensional Stefan problem by space-time finite elements
• The Determination of the Optimum Accelerating Factor for Successive Over-relaxation
• Continuously deforming finite elements for the solution of parabolic problems, with and without phase change
• On the Angle Condition in the Finite Element Method
• The Solution of a Quadratic Programming Problem Using Systematic Overrelaxation
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