Adaptive control to a dry etch process by microcomputer

DOI10.1016/0005-1098(82)90055-3zbMath0493.93031MaRDI QIDQ1168929

S. Singh

Publication date: 1982

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/0005-1098(82)90055-3

zbMATH Keywords

microcomputers; deadbeat controller; solid-state physics; dry etch processes; real-time control system with adaptive control; recursive least-squares estimation

Mathematics Subject Classification ID

93C10: Nonlinear systems in control theory

93C40: Adaptive control/observation systems

93E10: Estimation and detection in stochastic control theory

68N25: Theory of operating systems

76X05: Ionized gas flow in electromagnetic fields; plasmic flow

68N99: Theory of software