The effect of laser light propagation through a self-induced inhomogeneous process gas on temperature dependent laser-assisted chemical etching.

DOI10.1016/S0017-9310(02)00299-5zbMATH Open1037.78503MaRDI QIDQ1399441FDOQ1399441

Authors: J. S. jun. Hammonds, Mark Shannon 

Publication date: 30 July 2003

Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)

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Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Lasers, masers, optical bistability, nonlinear optics (78A60) Chemistry (general) in thermodynamics and heat transfer (80A50)

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• An analytical modeling of heat transfer for laser-assisted nanoimprinting processes

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