The effect of laser light propagation through a self-induced inhomogeneous process gas on temperature dependent laser-assisted chemical etching.

DOI10.1016/S0017-9310(02)00299-5MaRDI QIDQ1399441zbMATH OpenFDO

Authors J. S. jun. Hammonds, Mark Shannon

Publication date 30 July 2003

Published in International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Lasers, masers, optical bistability, nonlinear optics (78A60) Chemistry (general) in thermodynamics and heat transfer (80A50)

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