Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

DOI10.1023/A:1022914020076zbMath1113.74405MaRDI QIDQ1415684

D. Massart

Publication date: 9 December 2003

Published in: Nonlinear Dynamics (Search for Journal in Brave)

zbMATH Keywords

nonlinear modal analysis; clamped-clamped micro beams; micro switch

Mathematics Subject Classification ID

74K10: Rods (beams, columns, shafts, arches, rings, etc.)

74M05: Control, switches and devices (``smart materials) in solid mechanics