Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
DOI10.1016/J.EJOR.2017.02.026zbMATH Open1403.90281OpenAlexW2590662767MaRDI QIDQ1753643FDOQ1753643
Authors: Zheng Wang, Felix T. S. Chan, Wen-Liang Chen 
Publication date: 29 May 2018
Published in: European Journal of Operational Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ejor.2017.02.026
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queueingsemiconductor manufacturingproductionbi-objective optimizationrobust production capacity planning
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Cites Work
- Stochastic programming based capacity planning for semiconductor wafer fab with uncertain demand and capacity
- Tool capacity planning for semiconductor fabrication facilities under demand uncertainty
- Robust capacity planning in semiconductor manufacturing
- Taxonomy of batch queueing models in manufacturing systems
- Capacity planning with sequential two-level time constraints in the back-end process of wafer fabrication
- Capacity planning for a maintenance service provider with advanced information
- A review on strategic capacity planning for the semiconductor manufacturing industry
- Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing
- Tool capacity planning in semiconductor manufacturing.
- Estimating performance in a robotic mobile fulfillment system
- Energy-efficient rail guided vehicle routing for two-sided loading/unloading automated freight handling system
- Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants
Cited In (7)
- Semiconductor lot allocation using robust optimization
- Robust production and transportation planning in thin film transistor-liquid crystal display (TFT-LCD) industry under demand and price uncertainties
- Connecting transport AMHS in a wafer fab
- Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing
- Dynamic dispatching for interbay automated material handling with lot targeting using improved parallel multiple-objective genetic algorithm
- Title not available (Why is that?)
- Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab
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