Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
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Recommendations
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Cites work
- A review on strategic capacity planning for the semiconductor manufacturing industry
- Capacity planning for a maintenance service provider with advanced information
- Capacity planning of serial and batch machines with capability constraints for wafer fabrication plants
- Capacity planning with sequential two-level time constraints in the back-end process of wafer fabrication
- Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing
- Energy-efficient rail guided vehicle routing for two-sided loading/unloading automated freight handling system
- Estimating performance in a robotic mobile fulfillment system
- Robust capacity planning in semiconductor manufacturing
- Stochastic programming based capacity planning for semiconductor wafer fab with uncertain demand and capacity
- Taxonomy of batch queueing models in manufacturing systems
- Tool capacity planning for semiconductor fabrication facilities under demand uncertainty
- Tool capacity planning in semiconductor manufacturing.
Cited in
(7)- Semiconductor lot allocation using robust optimization
- Robust production and transportation planning in thin film transistor-liquid crystal display (TFT-LCD) industry under demand and price uncertainties
- Connecting transport AMHS in a wafer fab
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- Dynamic dispatching for interbay automated material handling with lot targeting using improved parallel multiple-objective genetic algorithm
- scientific article; zbMATH DE number 5524728 (Why is no real title available?)
- Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab
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