DOI10.1007/s11431-007-0005-5zbMath1258.74054MaRDI QIDQ1940807
Zaifa Zhou, Wei Lu, Qingan Huang, Wei-Hua Li
Publication date: 7 March 2013 Published in: Science in China. Series E (Search for Journal in Brave) Full work available at URL: https://doi.org/10.1007/s11431-007-0005-5
zbMATH Keywords
cellular automata; model; process simulation; optical lithography simulation
Mathematics Subject Classification ID
68Q80: Cellular automata (computational aspects)
74E40: Chemical structure in solid mechanics
Cites Work