Modeling reactive magnetron sputtering: a survey of different modeling approaches

DOI10.2478/ausi-2020-0008zbMath1458.93054OpenAlexW3068953202MaRDI QIDQ2220239

Péter Kádár, Rossi Róbert Madarász, András Kelemen

Publication date: 22 January 2021

Published in: Acta Universitatis Sapientiae. Informatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.2478/ausi-2020-0008

zbMATH Keywords

parameter identificationmathematical modelingcontrol theorycomputer simulationreactive magnetron sputtering

Mathematics Subject Classification ID

System identification (93B30) Application models in control theory (93C95) Mathematical modeling or simulation for problems pertaining to systems and control theory (93-10)

Uses Software

• Tridyn
• Kalypso
• PTSIM

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