Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector
DOI10.1515/JIIP-2020-0136zbMATH Open1478.78027OpenAlexW3138770401MaRDI QIDQ2232095FDOQ2232095
Authors: A. A. Borzunov, D. V. Lukyanenko, Eduard I. Rau, A. G. Yagola 
Publication date: 4 October 2021
Published in: Journal of Inverse and Ill-posed Problems (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1515/jiip-2020-0136
Recommendations
- 3D-measurement using a scanning electron microscope
- An improved method to detect riblets on surfaces in nanometer scaling using SEM
- An electron tomography algorithm for reconstructing 3D morphology using surface tangents of projected scattering interfaces
- Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
- Reconstruction in the three-dimensional parallel scanning geometry with application in synchrotron-based x-ray tomography
Numerical solutions to overdetermined systems, pseudoinverses (65F20) Ill-posedness and regularization problems in numerical linear algebra (65F22) Technical applications of optics and electromagnetic theory (78A55) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) Electron optics (78A15) Optimization problems in optics and electromagnetic theory (78M50)
Cites Work
- Title not available (Why is that?)
- Definitions and examples of inverse and ill-posed problems
- Regularized reconstruction of a surface from its measured gradient field
- Computational methods for applied inverse problems. Selected papers based on the presentations at the international workshop, Beijing, China, July 12--16, 2010.
- Fast and accurate surface normal integration on non-rectangular domains
Cited In (5)
- Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
- Title not available (Why is that?)
- 3D-measurement using a scanning electron microscope
- An electron tomography algorithm for reconstructing 3D morphology using surface tangents of projected scattering interfaces
- An improved method to detect riblets on surfaces in nanometer scaling using SEM
This page was built for publication: Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector
Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q2232095)
