Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector

DOI10.1515/JIIP-2020-0136zbMATH Open1478.78027OpenAlexW3138770401MaRDI QIDQ2232095FDOQ2232095

Authors A. A. Borzunov, D. V. Lukyanenko, Eduard I. Rau, A. G. Yagola

Publication date 4 October 2021

Published in Journal of Inverse and Ill-posed Problems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1515/jiip-2020-0136

zbMATH Keywords

reconstruction algorithmscanning electron microscopy3D topographybackscattered electrons detector

Mathematics Subject Classification ID

Numerical solutions to overdetermined systems, pseudoinverses (65F20) Ill-posedness and regularization problems in numerical linear algebra (65F22) Technical applications of optics and electromagnetic theory (78A55) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) Electron optics (78A15) Optimization problems in optics and electromagnetic theory (78M50)

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Cites work

• scientific article; zbMATH DE number 803211 (Why is no real title available?)
• Computational methods for applied inverse problems. Selected papers based on the presentations at the international workshop, Beijing, China, July 12--16, 2010.
• Definitions and examples of inverse and ill-posed problems
• Fast and accurate surface normal integration on non-rectangular domains
• Regularized reconstruction of a surface from its measured gradient field

Cited in

(5)

• An improved method to detect riblets on surfaces in nanometer scaling using SEM
• An electron tomography algorithm for reconstructing 3D morphology using surface tangents of projected scattering interfaces
• Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
• 3D-measurement using a scanning electron microscope
• scientific article; zbMATH DE number 2031606 (Why is no real title available?)

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