Efficient finite element method for grating profile reconstruction

DOI10.1016/j.jcp.2015.09.016zbMath1349.65594OpenAlexW1645093272MaRDI QIDQ2374829

Ruming Zhang, Jiguang Sun

Publication date: 5 December 2016

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jcp.2015.09.016

zbMATH Keywords

inverse problemfinite element methodquasi-Newton methodoptimization method

Mathematics Subject Classification ID

Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Numerical methods for inverse problems for boundary value problems involving PDEs (65N21)

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