A coupled two-degree-of-freedom pull-in model for micromirrors under capillary force
DOI10.1007/S00707-011-0558-ZzbMATH Open1398.74244OpenAlexW2063204302WikidataQ58889991 ScholiaQ58889991MaRDI QIDQ2392407FDOQ2392407
Hassan Zohoor, Hamid Moeenfard, M. T. Ahmadian, Ali Darvishian
Publication date: 1 August 2013
Published in: Acta Mechanica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s00707-011-0558-z
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Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Micromechanics of solids (74M25) Finite element methods applied to problems in solid mechanics (74S05)
Cited In (6)
- Modeling switching response of torsional micromirrors for optical microsystems
- Lattice Boltzmann model for simulation of a nano-scanner immersed in ionic dense media
- Capillary collapse of a micro-double cantilever beam: a rigorous study
- Numerical simulation and new controller design of steerable nano-mirror in ionic liquid electrolytes
- A coupled bending-torsion model for electrostatically actuated torsional nano/micro-actuators with considering influence of van der Waals force
- A scheme for micro-manipulation based on capillary force
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