Piezoelectric resonators with mechanical damping and resistance in current conduction
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Publication:2462896
DOI10.1007/s11433-007-0064-4zbMath1388.74044OpenAlexW2225282854MaRDI QIDQ2462896
Yook-Kong Yong, Mihir S. Patel
Publication date: 5 December 2007
Published in: Science in China. Series G (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11433-007-0064-4
piezoelectric materialsMEMSelectrical conductivityquality factorenergy sinkmechanical dissipation and viscosity
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