Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers

DOI10.1007/s11431-007-0051-zzbMath1126.74385OpenAlexW2278826695MaRDI QIDQ2468299

Lifeng Ge

Publication date: 22 January 2008

Published in: Science in China. Series E (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11431-007-0051-z

zbMATH Keywords

optimal designmodelmicromachined capacitive ultrasonic transducermicromachined electrostatic ultrasonic transducerultrasonic imaging transducer

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15)

Cites Work

• Analysis of Heterogeneous Anisotropic Plates

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