Plasma energy transport to an electrically biased surface

DOI10.1016/J.IJHEATMASSTRANSFER.2004.06.004MaRDI QIDQ2567029zbMATH OpenOpenAlexFDO

Authors F. B. Yeh, P. S. Wei

Publication date 29 September 2005

Published in International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijheatmasstransfer.2004.06.004

zbMATH Keywords

biased surfaceelectron-ion temperature ratioenergy transmission factorion-to-electron mass rationet current densityplasma energy fluxpresheathsheath

Mathematics Subject Classification ID

Motion of charged particles (78A35)

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(5)

• scientific article; zbMATH DE number 5667195 (Why is no real title available?)
• Sheath evolution in electronegative plasma
• Heat transfer -- a review of 2004 literature
• A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation
• The effect of sheath on plasma momentum transport to an electrically biased surface

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