A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups

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Publication:2642312

DOI10.1007/s00291-006-0062-3zbMath1146.90408OpenAlexW1969597348MaRDI QIDQ2642312

Yanyan Li

Publication date: 20 August 2007

Published in: OR Spectrum (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00291-006-0062-3




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