A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups
From MaRDI portal
Publication:2642312
DOI10.1007/s00291-006-0062-3zbMath1146.90408OpenAlexW1969597348MaRDI QIDQ2642312
Publication date: 20 August 2007
Published in: OR Spectrum (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s00291-006-0062-3
Related Items (6)
Job scheduling of diffusion furnaces in semiconductor fabrication facilities ⋮ A survey of job shop scheduling problem: the types and models ⋮ A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns for yield enhancement in semiconductor manufacturing ⋮ A hybrid differential evolution approach based on surrogate modelling for scheduling bottleneck stages ⋮ Stochastic programming for vendor portfolio selection and order allocation under delivery uncertainty ⋮ An evolutionary approach to rehabilitation patient scheduling: A case study
Cites Work
- A state-of-the-art review of parallel-machine scheduling research
- A genetic algorithm for flowshop sequencing
- A local search heuristic for unrelated parallel machine scheduling with efficient neighborhood search
- Two-stage no-wait scheduling models with setup and removal times separated
- Total flowtime in no-wait flowshops with separated setup times.
- Approximative procedures for no-wait job shop scheduling.
- Batch scheduling in a two-machine flow shop with limited buffer and sequence independent setup times and removal times.
- A heuristic for scheduling two-machine no-wait flow shops with anticipatory setups
- Scheduling multipurpose batch process industries with no-wait restrictions by simulated annealing
- Job-shop scheduling with blocking and no-wait constraints
- Scheduling with batching: A review
- Scheduling with limited machine availability
- Genetic Algorithms and Random Keys for Sequencing and Optimization
- Modelling and optimization of industrial manufacturing processes subject to no-wait constraints
- Minimizing total completion time in a no-wait flowshop with sequence-dependent additive changeover times
- Distributed supply-chain project rescheduling: part II—distributed affected operations rescheduling algorithm
- Algorithms for Solving Production-Scheduling Problems
- A Survey of Machine Scheduling Problems with Blocking and No-Wait in Process
- A new heuristic and dominance relations for no-wait flowshops with setups
- Batch scheduling in the no-wait two-machine flowshop to minimize the makespan
This page was built for publication: A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups