A mathematical model of silicon wafer contamination based on discrete source method.

zbMATH Open1063.74535MaRDI QIDQ2743397FDOQ2743397

Authors: Yu. A. Eremin, N. V. Orlov, A. G. Sveshnikov 

Publication date: 20 November 2001

Published in: Matematicheskoe Modelirovanie (Search for Journal in Brave)

Full work available at URL: http://mathnet.ru/eng/mm/v8/i10/p113

Mathematics Subject Classification ID

Fracture and damage (74R99)

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