A mathematical model of silicon wafer contamination based on discrete source method.

MaRDI QIDQ2743397zbMATH OpenFDO

Authors Yu. A. Eremin, N. V. Orlov, A. G. Sveshnikov

Publication date 20 November 2001

Published in Matematicheskoe Modelirovanie (Search for Journal in Brave)

Full work available at URL http://mathnet.ru/eng/mm/v8/i10/p113

Mathematics Subject Classification ID

Fracture and damage (74R99)

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