A model for extreme ultraviolet radiation conversion efficiency from laser produced mass-limited tin-based droplet target plasmas

DOI10.1088/0253-6102/57/4/25MaRDI QIDQ2913662zbMATH OpenOpenAlexFDO

Authors Tao Wu, Xin-Bing Wang, Shi-Cheng Yu, Lun Xiong

Publication date 26 September 2012

Published in Communications in Theoretical Physics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1088/0253-6102/57/4/25

zbMATH Keywords

conversion efficiencyextreme ultraviolet lithographylaser produced plasma

Mathematics Subject Classification ID

Lasers, masers, optical bistability, nonlinear optics (78A60) Quantum optics (81V80) Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

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