Modelling and optimization of a silicon tuning fork gyroscope

DOI10.1002/PAMM.200410015MaRDI QIDQ2954572zbMATH OpenOpenAlexFDO

Authors

Publication date 24 January 2017

Published in PAMM (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/pamm.200410015

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

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Cited in

(5)

• scientific article; zbMATH DE number 5287973 (Why is no real title available?)
• Size optimization of MEMS gyroscopes using substructuring
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• Determination of parameters of the primary mode of the tunung fork type solid-state gyroscope
• Modeling and design optimization of a resonant optothermoacoustic trace gas sensor

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