Modelling and optimization of a silicon tuning fork gyroscope

DOI10.1002/PAMM.200410015zbMATH Open1354.74162OpenAlexW2040128611MaRDI QIDQ2954572FDOQ2954572

Authors:

Publication date: 24 January 2017

Published in: PAMM (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/pamm.200410015

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Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Cited In (5)

• Title not available (Why is that?)
• Size optimization of MEMS gyroscopes using substructuring
• Identification of MEMS gyroscope structure using frequency response data
• Determination of parameters of the primary mode of the tunung fork type solid-state gyroscope
• Modeling and design optimization of a resonant optothermoacoustic trace gas sensor

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