Numerical modeling of a MEMS actuator considering several magnetic force calculation methods

DOI10.1108/03321641111133118zbMATH Open1358.78038OpenAlexW1991934534MaRDI QIDQ2970481FDOQ2970481

Authors Thomas Preisner, Christian Bolzmacher, Andreas Gerber, Karin Bauer, Eckhard Quandt, W. Mathis

Publication date 30 March 2017

Published in COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering (Search for Journal in Brave)

Full work available at URL http://www.repo.uni-hannover.de/handle/123456789/2768

zbMATH Keywords

MEMSactuatorsforce measurement

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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