Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches

DOI10.1108/03321641011078715zbMath1218.78141OpenAlexW2004905243MaRDI QIDQ3019324

Abdelkader Benabou, Abdelmounaïm Tounzi, Francisc Bölöni

Publication date: 28 July 2011

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321641011078715

zbMATH Keywords

finite element analysisMEMSvoltageelectromechanical devices

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Technical applications of optics and electromagnetic theory (78A55) Electro- and magnetostatics (78A30)

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