Cycle time reduction via machine-to-operation qualification
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Publication:3055218
DOI10.1080/00207540802452140zbMath1198.90125OpenAlexW2025046394MaRDI QIDQ3055218
Publication date: 7 November 2010
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/00207540802452140
optimisationsemiconductor manufacturingcycle timemachine availabilityphotolithographyfactory productivity
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