Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process
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Publication:3062531
DOI10.1080/17415970600838764zbMath1202.76149OpenAlexW2069685780MaRDI QIDQ3062531
Laurent Autrique, Sébastien Rouquette, Laurent Thomas, Charles Chaussavoine
Publication date: 28 December 2010
Published in: Inverse Problems in Science and Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/17415970600838764
inverse problemsensitivity analysispartial differential equationsnumerical design of experimentsthin film elaboration
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