A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices

DOI10.1002/jnm.770zbMath1211.78031MaRDI QIDQ3082627

Andreas C. Cangellaris, Prasad Sumant, N. R. Aluru

Publication date: 16 March 2011

Published in: International Journal of Numerical Modelling: Electronic Networks, Devices and Fields (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/jnm.770

zbMATH Keywords

conformal mapping; FEM; MEMS; electrostatically actuated

Mathematics Subject Classification ID

65E05: General theory of numerical methods in complex analysis (potential theory, etc.)

78M10: Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory

78A30: Electro- and magnetostatics

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Cites Work

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