Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process

DOI10.1007/978-3-642-57489-4_42zbMath1439.62047OpenAlexW192829468MaRDI QIDQ3298702

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Publication date: 15 July 2020

Published in: Compstat (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/978-3-642-57489-4_42

zbMATH Keywords

data miningdecision treeartificial neural networksemiconductor manufacturingTaguchi parameter design

Mathematics Subject Classification ID

Computational methods for problems pertaining to statistics (62-08) Applications of statistics in engineering and industry; control charts (62P30)

Cites Work

• Data mining. Concepts and techniques
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