Applications of quantitative methods in semiconductor manufacturing

DOI10.1016/J.COR.2014.08.003zbMATH Open1348.90446OpenAlexW2038842732MaRDI QIDQ337289FDOQ337289

Authors:

Publication date: 10 November 2016

Published in: Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cor.2014.08.003

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Mathematics Subject Classification ID

Case-oriented studies in operations research (90B90) Proceedings, conferences, collections, etc. pertaining to operations research and mathematical programming (90-06)

Cited In (2)

• Semiconductor manufacturing automation
• Simulation of Semiconductor Processes and Devices 2004

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