Sensitivity of resonance frequency in the detection of thin layer using nano-slit structures

DOI10.1093/IMAMAT/HXAA041MaRDI QIDQ3382887zbMATH OpenOpenAlexFDO

Authors

Publication date 22 September 2021

Published in IMA Journal of Applied Mathematics (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/2005.03762

zbMATH Keywords

asymptotic expansionsensitivity analysisnano-sensingthin film structure

Mathematics Subject Classification ID

Wave scattering in solid mechanics (74J20) Inverse problems for waves in solid mechanics (74J25) Micromechanics of solids (74M25) Junctions (74K30)

Abstract: We derive the formulas for the resonance frequencies and their sensitivity when the nano-slit structures are used in the detection of thin layers. For a thin layer with a thickness of $H$ deposited over the nanostructure, we show quantitatively that for both single and periodic slit structures with slit aperture size $delta$, the sensitivity of resonance frequency reduces as $H$ increases. Specifically, the sensitivity is of order $O(delta/H)$ if $H>delta$ and of order $O(1+lnH/delta)$ otherwise. The evanescent wave modes are present along the interface between the thin dielectric film and ambient medium above. From the mathematical derivations, it is observed that the sensitivity of the resonance frequency highly depends on the effect of evanescent wave modes on the tiny slit apertures.

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