Influence of shadowing on ellipsometric quantities of randomly rough surfaces and thin films

DOI10.1080/09500340701618379MaRDI QIDQ3519005zbMATH OpenOpenAlexFDO

Authors Ivan Ohlídal, David Nečas

Publication date 12 August 2008

Published in Journal of Modern Optics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/09500340701618379

zbMATH Keywords

scalar diffraction theoryshadowingrough surfacesellipsometryrough films

Mathematics Subject Classification ID

Diffraction, scattering (78A45)

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Cited in

(1)

• Effect of noise on the optical parameters extracted from different ellipsometric configurations

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