An analysis of flow, temperature, and chemical composition distortion in gas sampling through an orifice during chemical vapor deposition

DOI10.1063/1.869954zbMath1147.76508OpenAlexW2075061591MaRDI QIDQ3538976

Mark Swihart, Steven L. Girshick

Publication date: 17 November 2008

Published in: Physics of Fluids (Search for Journal in Brave)

Full work available at URL: https://semanticscholar.org/paper/21a61b447da902a3a40fe29f8e3cac7504e4f4d8

Mathematics Subject Classification ID

Fluid mechanics (76-XX)

Cites Work

• Gaskinetics and gasdynamics of orifice flow

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