Surface AcousticWave Linear Motor Using Glass Substrate

DOI10.1007/978-1-4020-9438-5_21zbMath1190.93071OpenAlexW165568808MaRDI QIDQ3565557

Hiroyuki Kotani, Takeshi Mizuno, Masaya Takasaki

Publication date: 4 June 2010

Published in: Motion and Vibration Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/978-1-4020-9438-5_21

zbMATH Keywords

ultrasonic motorsurface acoustic wave (SAW) linear motor

Mathematics Subject Classification ID

Application models in control theory (93C95)

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