3D electromagnetic simulation of a large diameter cylindrical surface wave excited plasma reactor

DOI10.1108/03321640810890771zbMATH Open1156.78305OpenAlexW1970724157MaRDI QIDQ3602330FDOQ3602330

Authors:

Publication date: 12 February 2009

Published in: COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321640810890771

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zbMATH Keywords

simulationelectromagnetismmicrowavessurface properties of materials

Mathematics Subject Classification ID

Waves and radiation in optics and electromagnetic theory (78A40)

Cited In (2)

• Modeling electromagnetic performance of plasma sustained by surface-waves
• Three-dimensional discharge simulation of inductively coupled plasma (ICP) etching reactor

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