A methodology for fast finite element modeling of electrostatically actuated MEMS

DOI10.1002/nme.2469zbMath1160.74388MaRDI QIDQ3623185

Prasad Sumant, Andreas C. Cangellaris, N. R. Aluru

Publication date: 16 April 2009

Published in: International Journal for Numerical Methods in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/nme.2469

zbMATH Keywords

modeling; FEM; MEMS; electrostatic actuation

Mathematics Subject Classification ID

74M05: Control, switches and devices (``smart materials) in solid mechanics

74S05: Finite element methods applied to problems in solid mechanics

74F15: Electromagnetic effects in solid mechanics

78A55: Technical applications of optics and electromagnetic theory

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